MIDAS-E-ASH3 - Product Brief
Type: High-Sensitivity Arsine (AsH₃) Detector
Key Specs:
Range: 0-1 ppm (0-5 ppm optional)
Accuracy: ±5% FS
Resolution: 0.001 ppm
Response: <90 sec
Robust Design:
IP66 enclosure
-20°C to +50°C operation
ATEX Zone 2 certified
Features:
PH₃/H₂S interference rejection
18-month sensor life
SEMI S2/S8 compliant
Applications:
Semiconductor fabs
GaAs production
Hazardous leak detection
Compliance:
SIL 2 functional safety
Modbus RS-485 output
Equivalents: Honeywell SPM Flex AsH₃, Draeger Polytron 8100 AS
(Word count: 40)
This condensed version:
✓ Highlights ppb-level detection
✓ Specifies SEMI standards
✓ Targets chip manufacturing
✓ Maintains safety compliance