092977 AMAT Endura Target 200mm TNTLM 4N5
Type: Tantalum Nitride/Titanium Laminated Sputtering Target (PVD)
Material: TNTLM (TaN/Ti laminate)
Purity: 4N5 (99.995%)
Diameter: 200 mm (8")
Application: Advanced semiconductor metallization (AMAT Endura™ systems)
Key Spec: Low-defect, high-uniformity films for logic/DRAM